Optical properties of (Mn, Co) co-doped ZnO films prepared by dual-radio frequency magnetron sputtering

被引:27
|
作者
Gu, Zheng-bin
Lu, Ming-hui
Wang, Jing
Du, Chao-ling
Yuan, Chang-sheng
Wu, Di
Zhang, Shan-tao
Zhu, Yong-yuan
Zhu, Shi-ning
Chen, Yan-feng [1 ]
机构
[1] Nanjing Univ, Natl Lab Solid State Microstruct, Nanjing 210093, Peoples R China
[2] Nanjing Univ, Dept Mat Sci & Engn, Nanjing 210093, Peoples R China
关键词
sputtering; zinc oxide; doped II-VI semiconductor; optical properties;
D O I
10.1016/j.tsf.2006.04.030
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
Dual-radio frequency magnetron sputtering was employed to prepare (Mn, Co) co-doped ZnO films on sapphire (0001). X-ray diffraction and X-ray photoelectron spectroscopy results indicate that the films are highly c-axis oriented and the doped Mn and Co ions in films are both in the divalent states. A dominant photoluminescence peak was observed at the wavelength of 405 nm. Ultraviolet-Visible absorption spectra show band gaps of 2.80, 2.90, 3.27, and 3.22 eV for (Mn-0.02, Co-0.04) Zn0.94O, Zn0.90Co0.10, Zn0.97Mn0.03O and ZnO films, respectively. A red-shift more than 500 meV was observed in a (Mn, Co) co-doped ZnO film. The Raman spectra measurement of (Mn, Co)ZnO films revealed additional vibrational modes at 276.6, 525.6, 634.6, and 643.9 cm(-1) compared to the host phonons of ZnO. (c) 2006 Elsevier B.V. All rights reserved.
引用
收藏
页码:2361 / 2365
页数:5
相关论文
共 50 条
  • [31] Spectroscopic ellipsometric determination of optical properties of V-Al co-doped ZnO films by rf magnetron sputtering
    Sayari, A.
    El Mir, L.
    Al-Heniti, S.
    Shalaan, E.
    Yaghmour, S. J.
    Al-Thabaiti, S. A.
    Al-Ghamdi, A. A.
    Yakuphanoglu, F.
    JOURNAL OF ELECTROCERAMICS, 2013, 30 (04) : 221 - 227
  • [32] Spectroscopic ellipsometric determination of optical properties of V-Al co-doped ZnO films by rf magnetron sputtering
    A. Sayari
    L. El Mir
    S. Al-Heniti
    E. Shalaan
    S. J. Yaghmour
    S. A. Al-Thabaiti
    A. A. Al-Ghamdi
    F. Yakuphanoglu
    Journal of Electroceramics, 2013, 30 : 221 - 227
  • [33] Optical properties of Mn-Co-Ni-O thin films prepared by radio frequency sputtering deposition
    Zhou, Wei
    Wu, Jing
    Ouyang, Cheng
    Gao, Yanqing
    Xu, Xiaofeng
    Huang, Zhiming
    JOURNAL OF APPLIED PHYSICS, 2014, 115 (09)
  • [34] Optical properties of Mn-Co-Ni-O thin films prepared by radio frequency sputtering deposition
    Huang, Z. (zmhuang@mail.sitp.ac.cn), 1600, American Institute of Physics Inc. (115):
  • [35] Structure and Magnetic Properties of Mn-Fe co-doped ZnO thin Films Depositedby RF-Magnetron Sputtering
    Malapati, V.
    Venkataratnam, K. K.
    Singh, R.
    62ND DAE SOLID STATE PHYSICS SYMPOSIUM, 2018, 1942
  • [36] Modulation of electrical and optical properties of gallium-doped ZnO films by radio frequency magnetron sputtering
    梁爽
    梅增霞
    杜小龙
    ChinesePhysicsB, 2012, 21 (06) : 482 - 488
  • [37] Modulation of electrical and optical properties of gallium-doped ZnO films by radio frequency magnetron sputtering
    Liang Shuang
    Mei Zeng-Xia
    Du Xiao-Long
    CHINESE PHYSICS B, 2012, 21 (06)
  • [38] Influence of rapid thermal annealing time on physical properties of Mg and F co-doped ZnO thin films deposited by radio frequency magnetron sputtering
    Wang, Fang-Hsing
    Chen, Mao-Shan
    Liu, Han-Wen
    Kang, Tsung-Kuei
    THIN SOLID FILMS, 2022, 757
  • [39] Structural and optical properties of InN films prepared by radio frequency magnetron sputtering
    Shinoda, H
    Mutsukura, N
    THIN SOLID FILMS, 2006, 503 (1-2) : 8 - 12
  • [40] Structural and Magnetic Properties of Co-Doped MnxGe1-x Films Prepared by Magnetron Co-Sputtering
    Su, Hang
    Wang, Yan-Yan
    Gu, Guang-Rui
    Wu, Bao-Jia
    FERROELECTRICS, 2019, 546 (01) : 169 - 180