Design and Fabrication of CD-Like Microfluidic Platforms for Diagnostics: Polymer-Based Microfabrication

被引：64

作者：

Lee, L. James ^{[1
]}

Madou, Marc J. ^{[2
]}

Koelling, Kurt W. ^{[1
]}

Daunert, Sylvia ^{[3
]}

Lai, Siyi ^{[1
]}

Koh, Chee Guan ^{[1
]}

Juang, Yi-Je ^{[1
]}

Lu, Yumin ^{[2
]}

Yu, Liyong ^{[1
]}

机构：

[1] Ohio State Univ, Dept Chem Engn, Columbus, OH 43210 USA

[2] Ohio State Univ, Dept Mat Sci & Engn, Columbus, OH 43210 USA

[3] Univ Kentucky, Dept Chem, Lexington, KY 40506 USA

来源：

BIOMEDICAL MICRODEVICES | 2001年 / 3卷 / 04期

关键词：

microfabrication; CNC-machining; photolithography; electroplating; deep reactive ion etching; liquid resin casting; thin wall injection molding; hot embossing;

D O I：

10.1023/A:1012469017354

中图分类号：

R318 [生物医学工程];

学科分类号：

0831 ;

摘要：

Several microfabrication methods for polymer-based CD microfluidic platforms are presented in this paper. For prototyping, both traditional CNC-machining and photolithography techniques were used. For mass production, mold inserts were made by CNC-machining of tool steel and LIGA-like processes such as UV photolithography, photolithography/electroplating, and photolithography/deep reactive ion etching (DRIE). Several molding methods were tried, including liquid resin casting, thin wall injection molding, and hot embossing. Advantages and disadvantages of each method are explained. Plastic bonding for microfluidic platforms is also briefly discussed.

引用

页码：339 / 351

页数：13

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