Ultra-High-Frequency Temperature-Compensated Oscillators Based on Ovenized AlN Contour-Mode MEMS Resonators

被引：0
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作者：
Tazzoli, Augusto [1 ]
Piazza, Gianluca [1 ]
Rinaldi, Matteo [2 ]
机构：
[1] Carnegie Mellon Univ, Dept Elect & Comp Engn, Pittsburgh, PA 15213 USA
[2] Northeastern Univ, Dept Elect & Comp Engn, Boston, MA USA
来源：
2012 IEEE INTERNATIONAL FREQUENCY CONTROL SYMPOSIUM (FCS) | 2012年
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中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
This work demonstrates the possibility of achieving good temperature stability in ultra-high frequency AlN MEMS CMR based oscillators by means of resonator ovenization. This technique results in low power consumption, fast turn-on time, and good short term stability. Over the temperature range -45 divided by 85 degrees C, the 582 MHz oscillator exhibits a temperature stability as good as 125 ppm (limited by the electronic circuitry) and stable phase noise values better than -93 dBc/Hz at 1 kHz, and -160 dBc/Hz at 10 MHz offsets.
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页数：5
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    [J]. 2011 IEEE INTERNATIONAL ELECTRON DEVICES MEETING (IEDM), 2011,
  • [2] Multi-Frequency Pierce Oscillators Based On Piezoelectric AlN Contour-Mode MEMS Resonators
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    [J]. 2008 IEEE INTERNATIONAL FREQUENCY CONTROL SYMPOSIUM, VOLS 1 AND 2, 2008, : 402 - +
  • [3] A 586 MHz Microcontroller Compensated MEMS Oscillator Based on Ovenized Aluminum Nitride Contour-Mode Resonators
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    Kuo, N. -K.
    Rinaldi, M.
    Pak, H.
    Fry, D.
    Bail, D.
    Stevens, D.
    Piazza, Gianluca
    [J]. 2012 IEEE INTERNATIONAL ULTRASONICS SYMPOSIUM (IUS), 2012, : 1055 - 1058
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    Tazzoli, A.
    Segovia-Fernandez, J.
    Felmetsger, V.
    Piazza, G.
    [J]. 2012 IEEE 25TH INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS (MEMS), 2012,
  • [5] Reconfigurable CMOS Oscillator Based on Multifrequency AlN Contour-Mode MEMS Resonators
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    [J]. IEEE TRANSACTIONS ON ELECTRON DEVICES, 2011, 58 (05) : 1281 - 1286
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    [J]. JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, 2010, 19 (03) : 570 - 580
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    [J]. SENSORS AND ACTUATORS A-PHYSICAL, 2010, 160 (1-2) : 132 - 140
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