Multi-Frequency Pierce Oscillators Based On Piezoelectric AlN Contour-Mode MEMS Resonators

被引：23
|
作者：
Zuo, Chengjie [1 ]
Sinha, Nipun [2 ]
Van der Spiegel, Jan [1 ]
Piazza, Gianluca [1 ,2 ]
机构：
[1] Univ Penn, Dept Elect & Syst Engn, Philadelphia, PA 19104 USA
[2] Univ Penn, Dept Mech Engn & Appl Mech, Philadelphia, PA 19104 USA
来源：
2008 IEEE INTERNATIONAL FREQUENCY CONTROL SYMPOSIUM, VOLS 1 AND 2 | 2008年
关键词：
Pierce Oscillator; Multi-Frequency Oscillator; AlN Contour-Mode Resonator; MicroElectroMechanical Systems (MEMS); Piezoelectric Resonator;
D O I：
10.1109/FREQ.2008.4623028
中图分类号：
TP [自动化技术、计算机技术];
学科分类号：
0812 ;
摘要：
This paper reports on the first demonstration of multi-frequency (176, 222, 307, and 482 MHz) oscillators based on piezoelectric AlN contour-mode MEMS resonators. All the oscillators show phase noise values between -88 and -68 dBc/Hz at 1 kHz offset and phase noise floors as low as -160 dBc/Hz at 1 MHz offset. The same Pierce circuit design is employed to sustain oscillations at the 4 different frequencies, while the oscillator core consumes at most 10 mW. The AlN resonators are currently wirebonded to the integrated circuit realized in the AMIS 0.5 mu m 5 V CMOS process. This work constitutes a substantial step forward towards the demonstration of a single-chip multi-frequency reconfigurable timing solution that could be used in wireless communications and sensing applications.
引用
收藏
页码：402 / +
页数：2
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