High-Work-Function Transparent Conductive Oxides with Multilayer Films

被引：23
|
作者：
Song, Chunyan [1 ,2 ]
Chen, Hong [3 ]
Fan, Yi [1 ]
Luo, Jinsong [1 ]
Guo, Xiaoyang [1 ]
Liu, Xingyuan [1 ]
机构：
[1] Chinese Acad Sci, Changchun Inst Opt Fine Mech & Phys, State Key Lab Luminescence & Applicat, Changchun 130033, Peoples R China
[2] Chinese Acad Sci, Grad Sch, Beijing 100039, Peoples R China
[3] Chinese Acad Sci, Key Lab Opt Syst Adv Mfg Technol, Changchun 130033, Peoples R China
来源：
APPLIED PHYSICS EXPRESS | 2012年 / 5卷 / 04期
基金：
美国国家科学基金会;
关键词：
IN2O3;
D O I：
10.1143/APEX.5.041102
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
Transparent conductive oxide (TCO) films using WO3/Ag/WO3 (WAW) were fabricated under room temperature conditions. WAW has a low sheet resistance of 12 Omega/sq and a work function of 6.334 eV. This is one of the TCOs with the highest work function. These properties make it useful for application in electroluminescent devices and solar cells. Both theoretical calculation and experimental results show that the two WO3 layers strongly affect transparency, while the Ag layer determines transmittance and electrical performances. These rules can be applied in all dielectric/metal/dielectric structures. (C) 2012 The Japan Society of Applied Physics
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页数：3
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