A multi-axis MEMS sensor with integrated carbon nanotube-based piezoresistors for nanonewton level force metrology

被引：14
|
作者：
Cullinan, Michael A. [1 ,2 ]
Panas, Robert M. [1 ]
Culpepper, Martin L. [1 ]
机构：
[1] MIT, Dept Mech Engn, Cambridge, MA 02139 USA
[2] NIST, Intelligent Syst Div, Gaithersburg, MD 20899 USA
来源：
NANOTECHNOLOGY | 2012年 / 23卷 / 32期
关键词：
FABRICATION;
D O I：
10.1088/0957-4484/23/32/325501
中图分类号：
TB3 [工程材料学];
学科分类号：
0805 ; 080502 ;
摘要：
This paper presents the design and fabrication of a multi-axis microelectromechanical system (MEMS) force sensor with integrated carbon nanotube (CNT)-based piezoresistive sensors. Through the use of proper CNT selection and sensor fabrication techniques, the performance of the CNT-based MEMS force sensor was increased by approximately two orders of magnitude as compared to current CNT-based sensor systems. The range and resolution of the force sensor were determined as 84 mu N and 5.6 nN, respectively. The accuracy of the force sensor was measured to be better than 1% over the device's full range.
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页数：8
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