Design and Fabrication of a Multi-Axis MEMS Force Sensor with Integrated Carbon Nanotube Based Piezoresistors

被引：0

作者：

Cullinan, Michael A. ^{[1
]}

Panas, Robert M. ^{[1
]}

Culpepper, Martin L. ^{[1
]}

机构：

[1] MIT, Dept Mech Engn, 77 Massachusetts Ave,Room 35-135, Cambridge, MA 02139 USA

来源：

NANOTECHNOLOGY 2011: ELECTRONICS, DEVICES, FABRICATION, MEMS, FLUIDICS AND COMPUTATIONAL, NSTI-NANOTECH 2011, VOL 2 | 2011年

关键词：

Carbon Nanotube; Force Sensor; Piezoresistor; MEMS; HexFlex;

D O I：

暂无

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

Carbon nanotube-based strain sensors have the potential to overcome many of the limitations in small-scale force/displacement sensing technologies due to their small size and high strain sensitivity. In this paper, we will present the design and fabrication of a multi-axis MEMS force sensor with integrated carbon nanotube based piezoresistive sensors. We will show that through proper sensor design and fabrication it is possible to improve the performance of these sensors by several orders of magnitude and produce nanoscale sensors with a dynamic range of greater than 80 dB. Overall, the force sensor presented in this paper has a resolution of 5.6 nN and a range up to 84 mu N.

引用

页码：302 / 305

页数：4

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