Control circuit design of magnetic suspension stylus measuring instrument

被引:0
|
作者
Zhou Jianfei [1 ]
Chang Suping [1 ]
Hu Chunbing [1 ]
Wu Hao [1 ]
Zhang Zhongyu [1 ]
机构
[1] Huazhong Univ Sci & Technol, Sch Mech Sci & Engn, Wuhan 430074, Hubei, Peoples R China
来源
TENTH INTERNATIONAL SYMPOSIUM ON PRECISION ENGINEERING MEASUREMENTS AND INSTRUMENTATION | 2019年 / 11053卷
关键词
maglev support technology; surface topography measurement; control circuit;
D O I
10.1117/12.2511252
中图分类号
TH7 [仪器、仪表];
学科分类号
0804 ; 080401 ; 081102 ;
摘要
During the measurement, The traditional lever type measuring instrument will introduce a nonlinear error due to the rotation of the lever, which will affect the measurement result. A magnetic levitation stylus measuring instrument was designed based on it. It changed the lever supporting mode from the stylus shaft to the vertical direction linear translation which can eliminate the nonlinear error and improve the measurement accuracy. This paper introduces the measuring principle based on the magnetic levitation bearing stylus surface topography sensor, designs the electronic control system of the magnetic levitation contact measuring instrument, and finally conducts the surface topography measurement test. The experimental results show that the designed electronic control system can meet the design requirements of the magnetic levitation system.
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页数:6
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