Hysteresis in a Microactuator With Single-Domain Magnetic Thin Films

被引:12
|
作者
Wei, Zung-Hang [1 ]
Lo, Chi-Kuen [2 ]
Liu, Da-Ren [3 ]
Hsieh, Yi-Ping [1 ]
Lee, Yun-Ruei [1 ]
Shiao, Hong-Ren [1 ]
Chiu, Yi-Hsun [1 ]
Lee, Chiun-Peng [4 ]
Liao, Chun-Neng [4 ]
Chen, Ying-Jiun [4 ]
Hsu, Chia-Jung [4 ]
Lai, Mei-Feng [4 ]
机构
[1] Natl Tsing Hua Univ, Dept Power Mech Engn, Hsinchu 30013, Taiwan
[2] Natl Taiwan Normal Univ, Dept Phys, Taipei 116, Taiwan
[3] Natl Appl Res Labs, Instrument Technol Res Ctr, Hsinchu 300, Taiwan
[4] Natl Tsing Hua Univ, Inst Nanoengn & Microsyst, Hsinchu 300, Taiwan
关键词
Actuator; hysteresis; magnetic switching; magnetic thin films; single domain;
D O I
10.1109/TMAG.2009.2034331
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
An actuator with single-domain magnetic thin films is designed to investigate the actuation in the application of a magnetic field. The single-domain magnetic thin film used in this study has high shape anisotropy, and the single-domain magnetization is observed using magnetic force microscope. The hysteresis in the planar deflection of the cantilever beam is found, and the magnetic switching behavior of the single-domain magnetic thin films is also observed in the actuation.
引用
收藏
页码:630 / 633
页数:4
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