Efficient all-solid-state 213 nm laser source for microlithography

被引：0
|
作者：
Kubota, S [1 ]
Wiechmann, W [1 ]
Liu, LY [1 ]
Oka, M [1 ]
Kikuchi, H [1 ]
Suganuma, H [1 ]
Masuda, H [1 ]
Takeda, M [1 ]
机构：
[1] SONY CORP,RES CTR,KUBOTA OPTOELECT LAB,SHINAGAWA KU,TOKYO 141,JAPAN
来源：
OPTICAL MICROLITHOGRAPHY IX | 1996年 / 2726卷
关键词：
frequency-quintupled Q-sw Nd:YAG laser; repetition rate; microlithography; pump depletion;
D O I：
10.1117/12.240946
中图分类号：
O43 [光学];
学科分类号：
070207 ; 0803 ;
摘要：
引用
收藏
页码：841 / 846
页数：6
相关论文
共 50 条
  • [21] Efficient all-solid-state yellow laser source producing 1.2-W average power
    Pask, HM
    Piper, JA
    OPTICS LETTERS, 1999, 24 (21) : 1490 - 1492
  • [22] Efficient, all-solid-state, Raman laser in the yellow, orange and red
    Mildren, RP
    Convery, M
    Pask, HM
    Piper, JA
    Mckay, T
    OPTICS EXPRESS, 2004, 12 (05): : 785 - 790
  • [23] All-Solid-State Sub-200-nm Pulsed Deep Ultraviolet Source
    Kaneda, Yushi
    Peyghambarian, N.
    Miyazono, Kenshi
    Shimatani, Hiroya
    Honda, Yoshiyuki
    Yoshimura, Masashi
    Mori, Yusuke
    Kitaoka, Yasuo
    Sasaki, Takatomo
    2008 CONFERENCE ON LASERS AND ELECTRO-OPTICS & QUANTUM ELECTRONICS AND LASER SCIENCE CONFERENCE, VOLS 1-9, 2008, : 1222 - +
  • [24] ALL-SOLID-STATE LASER SOURCE FOR TUNABLE BLUE AND ULTRAVIOLET-RADIATION
    ZIMMERMANN, C
    VULETIC, V
    HEMMERICH, A
    HANSCH, TW
    APPLIED PHYSICS LETTERS, 1995, 66 (18) : 2318 - 2320
  • [25] All-solid-state parametric Raman anti-Stokes laser at 508 nm
    Mildren, R. P.
    Coutts, D. W.
    Spence, D. J.
    OPTICS EXPRESS, 2009, 17 (02): : 810 - 818
  • [26] All-solid-state 589 nm laser and the brightness of excited sodium guide star
    Liu, Jie
    Wang, Jian-Li
    Lü, Tian-Yu
    Sun, Jing-Wei
    Dong, Lei
    Guangxue Jingmi Gongcheng/Optics and Precision Engineering, 2014, 22 (12): : 3199 - 3204
  • [27] Development of Resonant Cavity Film for 575 nm All-Solid-State Laser System
    Zhu, Han
    Xin, Yawu
    Chen, Yunru
    Ma, Shihui
    Zhang, Yuxia
    Peng, Yongchao
    Lin, Yixin
    Xiong, Shifu
    Hu, Zhanggui
    COATINGS, 2023, 13 (07)
  • [28] Development of a compact 193-nm all-solid-state laser at 5 kHz
    Zheng, Quan
    Wang, Jinyan
    Chen, Xi
    Xiao, Huidong
    Liu, Yu
    Li, Qi
    Li, Shijie
    OPTICS COMMUNICATIONS, 2025, 578
  • [29] All-solid-state Nd:YAG-LBO yellow laser at 572 nm
    Liang, W.
    Sun, G. C.
    Yu, X.
    Li, B. Z.
    Jin, G. Y.
    LASER PHYSICS, 2011, 21 (06) : 1067 - 1070
  • [30] High efficiency single frequency 355 nm all-solid-state UV laser
    Xie, Xiaobing
    Wei, Daikang
    Ma, Xiuhua
    Li, Shiguang
    Liu, Jiqiao
    Zhu, Xiaolei
    Chen, Weibiao
    LASER PHYSICS, 2016, 26 (05)
12345