Study of charges in fluorinated polyimide film by using capacitance-voltage method

被引：1
|
作者：
Lee, YK [1 ]
机构：
[1] Adonbest Technol Inc, W Vancouver, BC V7S 1C8, Canada
来源：
MODERN PHYSICS LETTERS B | 2006年 / 20卷 / 07期
关键词：
fluorinated polyimide; capacitance-voltage; flat band voltage; depletion region; accumulation region; ULSI; interlayer dielectric;
D O I：
10.1142/S0217984906010822
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
The deviations of ideality, such as shifts or distortions, in the Capacitance-Voltage (C-V) curve were examined to characterize charges in fluorinated polyimide film in MPOS (Cu-fluorinated polyimide film-SiO2-Si) test structure. It was observed that charges in fluorinated polyimide film hard baked at 325 degrees C and annealed at 425 degrees C were mobile and positive charged. The mobile charge concentration was 10(11)/cm(2) and the activation energy of the drift of positive mobile charge was 0.6 V.
引用
收藏
页码：379 / 383
页数：5
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