Measuring the bending of asymmetric planar EAP structures

被引:3
|
作者
Weiss, Florian M. [1 ]
Zhao, Xue [1 ]
Thalmann, Peter [1 ]
Deyhle, Hans [1 ]
Urwyler, Prabitha [1 ]
Kovacs, Gabor
Mueller, Bert [1 ]
机构
[1] Univ Basel, Biomat Sci Ctr, Univ Hosp, CH-4031 Basel, Switzerland
来源
ELECTROACTIVE POLYMER ACTUATORS AND DEVICES (EAPAD) 2013 | 2013年 / 8687卷
关键词
Micro-cantilever; polyetheretherketone (PEEK); low-voltage dielectric electro-active polymer; artificial sphincter; silicone; silver contact; reflective gold layer thickness; Stoney formula; CANTILEVER ARRAY; SURFACE STRESS; MICROCANTILEVERS; SENSOR;
D O I
10.1117/12.2009355
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
The geometric characterization of low-voltage dielectric electro-active polymer (EAP) structures, comprised of nanometer thickness but areas of square centimeters, for applications such as artificial sphincters requires methods with nanometer precision. Direct optical detection is usually restricted to sub-micrometer resolution because of the wavelength of the light applied. Therefore, we propose to take advantage of the cantilever bending system with optical readout revealing a sub-micrometer resolution at the deflection of the free end. It is demonstrated that this approach allows us to detect bending of rather conventional planar asymmetric, dielectric EAP-structures applying voltages well below 10 V. For this purpose, we built 100 mu m-thin silicone films between 50 nm-thin silver layers on a 25 mu m-thin polyetheretherketone (PEEK) substrate. The increase of the applied voltage in steps of 50 V until 1 kV resulted in a cantilever bending that exhibits only in restricted ranges the expected square dependence. The mean laser beam displacement on the detector corresponded to 6 nm per volt. The apparatus will therefore become a powerful mean to analyze and thereby improve low-voltage dielectric EAP-structures to realize nanometer-thin layers for stack actuators to be incorporated into artificial sphincter systems for treating severe urinary and fecal incontinence.
引用
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页数:6
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