Micro-forming of thin film metallic glass by local laser heating

被引：7

作者：

Jeong, HW ^{[1
]}

Hata, S ^{[1
]}

Shimokohbe, A ^{[1
]}

机构：

[1] Tokyo Inst Technol, Precis & Intelligence Lab, Tokyo, Japan

来源：

FIFTEENTH IEEE INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS, TECHNICAL DIGEST | 2002年

关键词：

D O I：

10.1109/MEMSYS.2002.984280

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

This paper reports a new method for fabricating three-dimensional microstructure such as a bent micro beam made of a thin film metallic glass (TFMG). Metallic glasses are kinds of amorphous alloys and have suitable characteristics for microelectromechanical systems (MEMS) because they are isotropic and homogeneous as well as free from defects originated from the crystal structure. Moreover the metallic glasses soften in a certain temperature range called the super cooled liquid region (SCLR), which makes the metallic glasses easily be formed into three-dimensional shapes. In this paper, firstly, TFMG micro beams are fabricated using MEMS process. Secondly, a local laser heating and micro-forming system is introduced to heat and form a beam into a three-dimensional structure. Finally, as an example of a three-dimensional structure, a TFMG micro beam bent 90degrees is realized.

引用

页码：372 / 375

页数：4

共 50 条

[21] Behavior of joining interface between thin film metallic glass and silicon nitride at heating
Hata, Seiichi
Yamauchi, Ryusuke
Sakurai, Junpei
Shimokohbe, Akira
MATERIALS SCIENCE AND ENGINEERING B-ADVANCED FUNCTIONAL SOLID-STATE MATERIALS, 2008, 148 (1-3): : 149 - 153
[22] Parameter and Path Planning for a Laser-Chemical Production of Micro-Forming Dies
Cuypers, Pierre
von Freyberg, Axel
Goch, Gert
Stephen, Andreas
Vollertsen, Frank
TM-TECHNISCHES MESSEN, 2010, 77 (04) : 229 - 236
[23] Laser-assisted micro-forming process with miniaturised structures in sapphire dies
Samm, K.
Terzi, M.
Ostendorf, A.
Wulfsberg, J.
APPLIED SURFACE SCIENCE, 2009, 255 (24) : 9830 - 9834
[24] Micro-forming and surface evaluation of Zr41Ti14Cu12.5Ni10Be22.5 bulk metallic glass
Ok, Myoung-Ryul
Suh, Jin-Yoo
Chung, Sung Jae
Ji, Young Su
Hong, Kyung Tae
MATERIALS SCIENCE AND ENGINEERING A-STRUCTURAL MATERIALS PROPERTIES MICROSTRUCTURE AND PROCESSING, 2007, 454 (14-18): : 14 - 18
[25] Rarefaction after fast laser heating of a thin metal film on a glass mount
Inogamov, N. A.
Khokhov, V. A.
Petrov, Y. V.
Zhakhovsky, V. V.
Migdal, K. P.
Ilnitsky, D. K.
Hasegawa, N.
Nishikino, M.
Yamagiwa, M.
Ishino, M.
Kawachi, T.
Faenov, A. Y.
Pikuz, T. A.
Baba, M.
Minami, Y.
Suemoto, T.
SHOCK COMPRESSION OF CONDENSED MATTER - 2015, 2017, 1793
[26] Fabrication of metallic glass micro grooves by thermoplastic forming
Wang, Fengyan
Zhang, Hong
Liang, Xiong
Gong, Feng
Ma, Jiang
JOURNAL OF MICROMECHANICS AND MICROENGINEERING, 2017, 27 (02)
[27] Bending of Pd-based thin film metallic glasses by laser forming process
Ide, Yuki
Otsu, Masaaki
Sakurai, Junpei
Hata, Seiichi
Takashima, Kazuki
MICROELECTROMECHANCIAL SYSTEMS - MATERIALS AND DEVICES II, 2009, 1139 : 83 - 88
[28] Mechanical Properties Involved in the Micro-forming of Ultra-thin Stainless Steel Sheets
Cong-Hanh Pham
Thuillier, Sandrine
Manach, Pierre-Yves
METALLURGICAL AND MATERIALS TRANSACTIONS A-PHYSICAL METALLURGY AND MATERIALS SCIENCE, 2015, 46A (08): : 3502 - 3515
[29] Mechanical Properties Involved in the Micro-forming of Ultra-thin Stainless Steel Sheets
Cong-Hanh Pham
Sandrine Thuillier
Pierre-Yves Manach
Metallurgical and Materials Transactions A, 2015, 46 : 3502 - 3515
[30] Experimental investigation on: Laser shock micro-forming process using the mask and flexible pad
Wang, Xiao
Li, Liyin
Shen, Zongbao
Sha, Chaofei
Gao, Shuai
Li, Cong
Sun, Xianqing
Ma, Youjuan
Liu, Huixia
OPTICS AND LASERS IN ENGINEERING, 2017, 88 : 102 - 110

← 1 2 3 4 5 →