Large area silicon position sensitive photo-detector: Fabrication and characterization

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作者
Hamoudi, WK
Ismail, RA
Habib, HH
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TM [电工技术]; TN [电子技术、通信技术];
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0808 ; 0809 ;
摘要
In the present work, fabrication and characterization of a silicon position sensitive photo-detector PSD (diffused function) is given. These detectors are good candidate for the use in laser tracking system and in displacement measurement applications. The responsivity, detectivity and rise time of these detectors at the near infrared region (750-1080)nm were measured and discussed.
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页码:126 / 129
页数:4
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