Multi-layer Graphene Wire Grown by Annealing Sputtered Amorphous Carbon

被引:0
|
作者
Sato, Motonobu [1 ]
Takahashi, Makoto [1 ]
Nakano, Haruhisa [1 ]
Murakami, Tomo [1 ]
Kawabata, Akio [1 ]
Nihei, Mizuhisa [1 ]
Yokoyama, Naoki [1 ]
机构
[1] Natl Inst Adv Ind Sci & Technol, Collaborat Res Team Green Nanoelect Ctr GNC, Tsukuba, Ibaraki 3058569, Japan
来源
2012 IEEE INTERNATIONAL INTERCONNECT TECHNOLOGY CONFERENCE (IITC) | 2012年
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中图分类号
TP301 [理论、方法];
学科分类号
081202 ;
摘要
We have fabricated multi-layer graphene directly on SiO2 by annealing sputtered amorphous carbon with a Co catalyst without use of complicated transfer processes. Structural analysis revealed that the graphene sheets formed an epitaxial structure, aligned to the Co (111) surface. An MLG wire can sustain a high current density of 10(7) A/cm(2) which is over one order of magnitude higher than that of a Cu wire.
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页数:3
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