Applications of scanning probe microscopy in nanolithography on alkanethiol self-assembled monolayers

被引：3
|
作者：
Zhao, JW [1 ]
Kan, RR [1 ]
Zhang, Y [1 ]
Chen, HY [1 ]
机构：
[1] Nanjing Univ, Coll Chem & Chem Engn, Key Lab Analyt Chem Life Sci, Educ Minist China, Nanjing 210093, Peoples R China
来源：
ACTA PHYSICO-CHIMICA SINICA | 2006年 / 22卷 / 01期
关键词：
scanning probe microscopy; self-assembled monolayer; scanning tunneling microscope; atomic force microscope; nanolithography;
D O I：
10.3866/PKU.WHXB20060125
中图分类号：
O64 [物理化学（理论化学）、化学物理学];
学科分类号：
070304 ; 081704 ;
摘要：
Recent progress in the field of nanolithography of self-assembled monolayers by scanning probe microscopy (SPM), which is important in microelectronics and sensor technology, is introduced in the paper. According to the working principle, scanning probe lithography (SPL) can be classified into three categories, namely STM-based nanolithography, AFM-based nanolithography, and C-AFM-based nanolithography. SPL is a pivot of the fundamental study in the field of nanolithography for its high spatial resolution, case in fabrication and good controllability in operation. The possible application in information storage has been discussed as well.
引用
收藏
页码：124 / 130
页数：7
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