Low temperature sintering and microwave dielectric properties of CaSiO3-Al2O3 ceramics for LTCC applications

被引:24
|
作者
Wang, Huanping [1 ]
He, Zuopeng [2 ]
Li, Denghao [1 ]
Lei, Ruoshan [1 ]
Chen, Jinmin [1 ]
Xu, Shiqing [1 ]
机构
[1] China Jiliang Univ, Coll Mat Sci & Engn, Hangzhou 310018, Guangdong, Peoples R China
[2] Semicond Mfg Int Shanghai Corp, Shanghai 201203, Peoples R China
关键词
Microwave dielectric properties; CaSiO3; ceramic; Al2O3; LTCC; LOW-PERMITTIVITY; CRYSTALLIZATION CHARACTERISTICS; SYSTEM; MGTIO3-CATIO3; FREQUENCY; GLASSES; AL2O3; B2O3;
D O I
10.1016/j.ceramint.2013.08.031
中图分类号
TQ174 [陶瓷工业]; TB3 [工程材料学];
学科分类号
0805 ; 080502 ;
摘要
The effects of CuO, Li2CO3 and CaTiO3 additives on the densification, microstructure and microwave dielectric properties of CaSiO3-1 wt% Al2O3 ceramics for low-temperature co-fired applications were investigated. With a single addition of 1 wt% Li2CO3, the CaSiO3-1 wt% Al2O3 ceramic required a temperature of at least 975 degrees C to be dense enough. Large amount addition of Li2CO3 into the CaSiO3-1 wt% Al2O3 ceramics led to the visible presence of Li2Ca3Si6O16 and Li2Ca4Si4O13 second phases. Fixing the Li2CO3 content at 1 wt%, a small amount of CuO addition significantly promoted the sintering process and lowered the densification temperature to 900 degrees C whereas its addition deteriorated the microwave dielectric properties of CaSiO3-1 wt% Al2O3 ceramics. Based on 10 wt% CaTiO3 compensation in temperature coefficient, good microwave dielectric properties of epsilon(r)=8.92, Q x f=19,763 GHz and tau(f)= 1.22 ppm/degrees C could be obtained for the 0.2 wt% CuO and 1.5 wt% Li2CO3 doped CaSiO3-1 wt% Al2O3 ceramics sintered at 900 degrees C. The chemical compatibility of the above ceramics with silver during the cofiring process has also been investigated, and the result showed that there was no chemical reaction between silver and ceramics, indicating that the as-prepared composite ceramics were suitable for low-temperature co-fired ceramics applications. Crown Copyright (C) 2013 Published by Elsevier Ltd and Techna Group S.r.l. All rights reserved.
引用
收藏
页码:3895 / 3902
页数:8
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