Micro structuring of borosilicate glass by high-temperature micro-forming

被引：9
|
作者：
Schubert, Andreas [1 ]
Edelmann, Jan [1 ]
Burkhardt, Thomas [1 ]
机构：
[1] Fraunhofer Inst Machine Tools & Forming Technol I, Chemnitz, Germany
来源：
MICROSYSTEM TECHNOLOGIES-MICRO-AND NANOSYSTEMS-INFORMATION STORAGE AND PROCESSING SYSTEMS | 2006年 / 12卷 / 08期
关键词：
Tool Material; Isothermal Tempering; High Surface Quality; Glass Wafer; Aluminium Nitride;
D O I：
10.1007/s00542-005-0074-y
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
A new process technology is presented which allows the direct micro structuring of various glasses, especially bondable borosilicate glass (e.g. Pyrex(R)7740), by means of forming at high temperatures with a micro-structured tool. The technology and fabrication equipment are described on the basis of a molded demonstration structure, and possibilities for application and transfer to industrial manufacturing are shown.
引用
收藏
页码：790 / 795
页数：6
相关论文
共 50 条
  • [41] New classification and evaluation of micro-size effects in metal micro-forming processes
    School of Materials Science and Engineering, Harbin Institute of Technology, Harbin 150001, China
    Harbin Gongcheng Daxue Xuebao, 2006, 1 (26-31):
  • [42] Micro-size effects and their similarity evaluating methods in metal micro-forming processes
    Lei, Kun
    Zhang, Kaifeng
    Jixie Gongcheng Xuebao/Chinese Journal of Mechanical Engineering, 2007, 43 (07): : 213 - 220
  • [43] Hybrid forging processes of micro-double gear using micro-forming technology
    Shan Debin
    Xu Jie
    Wang Chunju
    Guo Bin
    INTERNATIONAL JOURNAL OF ADVANCED MANUFACTURING TECHNOLOGY, 2009, 44 (3-4): : 238 - 243
  • [44] Modeling of grain size effect on micro deformation behavior in micro-forming of pure copper
    Chan, W. L.
    Fu, M. W.
    Lu, J.
    Liu, J. G.
    MATERIALS SCIENCE AND ENGINEERING A-STRUCTURAL MATERIALS PROPERTIES MICROSTRUCTURE AND PROCESSING, 2010, 527 (24-25): : 6638 - 6648
  • [45] Development of a micro-forming system for micro-punching process of micro-hole arrays in brass foil
    Xu, Jie
    Guo, Bin
    Shan, Debin
    Wang, Chunju
    Li, Juan
    Liu, Yanwu
    Qu, Dongsheng
    JOURNAL OF MATERIALS PROCESSING TECHNOLOGY, 2012, 212 (11) : 2238 - 2246
  • [46] Application of ion irradiation for surface finish of micro-forming die
    Yang, Ming
    Osako, Atsushi
    JOURNAL OF MATERIALS PROCESSING TECHNOLOGY, 2008, 201 (1-3) : 315 - 318
  • [47] Micro-forming analysis of ultra-thin brass foil
    Mashalkar, Anil
    Kakandikar, Ganesh
    Nandedkar, Vilas
    MATERIALS AND MANUFACTURING PROCESSES, 2019, 34 (13) : 1509 - 1515
  • [48] Experimental Study of Local Micro-forming for Bi-HTS
    Zeng Pan
    Lu Yong-jin
    Lei Li-ping
    Qu Timing
    Fang Gang
    NUMIFORM 2010, VOLS 1 AND 2: DEDICATED TO PROFESSOR O. C. ZIENKIEWICZ (1921-2009), 2010, 1252 : 565 - 570
  • [49] Development of a VGRAIN system for CPFE analysis in micro-forming applications
    Jian Cao
    Weimin Zhuang
    Shiwen Wang
    Jianguo Lin
    The International Journal of Advanced Manufacturing Technology, 2010, 47 : 981 - 991
  • [50] Plasticity and size effects of micro-forming sheet processed by electropulsing
    Zhu, Jie
    Lin, Yao
    Liu, Shan
    Ma, Xinwu
    Wang, Guangchun
    MATERIALS AND MANUFACTURING PROCESSES, 2020, 35 (10) : 1146 - 1155
12345