Titanium dioxide nanostructures chemical sensor

被引:8
|
作者
Bertuna, A. [1 ,2 ]
Comini, E. [1 ,2 ]
Poli, N. [1 ,2 ]
Zappa, D. [1 ,2 ]
Sberveglieri, G. [1 ,2 ]
机构
[1] Univ Brescia, SENSOR Lab, Via D Valotti 9, I-25133 Brescia, Italy
[2] CNR INO, Via D Valotti 9, I-25133 Brescia, Italy
关键词
Titanium dioxide; nanostructures; hydrothermal treatment; chemical sensor; Raman spectroscopy;
D O I
10.1016/j.proeng.2016.11.204
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
Titanium dioxide (TiO2) nanostructures were grown directly on the sensitive area of the transducer. A titanium thin film was deposited on 2 . 2 mm(2) alumina substrates by RF magnetron sputtering and hydrothermal method was used to achieve TiO2. This method is characterized by the use of different solutions (KOH, NaOH), a not stirred pressure reactor and a heating system. As-prepared samples require an acid treatment followed by a calcination step to obtain pure TiO2 nanostructures. The nanostructured morphology was confirmed by a scanning electron microscope (SEM) and their structural properties were investigated by RAMAN spectroscopy. Obtained samples were used as gas sensors, and their behaviour towards several gaseous species was analysed in a wide range of working temperatures. Measurements were carried out in a test chamber, investigating the change in the electrical conductance due to the surrounding atmosphere.
引用
收藏
页码:313 / 316
页数:4
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