The gas field ion source for finely focused ion beam systems

被引：0
|
作者：
Thompson, W [1 ]
Armstrong, A [1 ]
Etchin, S [1 ]
Percival, R [1 ]
Saxonis, A [1 ]
机构：
[1] MICRION CORP,PEABODY,MA 01960
来源：
ION-SOLID INTERACTIONS FOR MATERIALS MODIFICATION AND PROCESSING | 1996年 / 396卷
关键词：
D O I：
暂无
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
引用
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页码：687 / 693
页数：7
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