alpha(6H)-SiC pressure sensors for high temperature applications

被引：25
|
作者：
Okojie, RS [1 ]
Ned, AA [1 ]
Kurtz, AD [1 ]
Carr, WN [1 ]
机构：
[1] KULITE SEMICOND PROD,LEONIA,NJ 07605
来源：
NINTH ANNUAL INTERNATIONAL WORKSHOP ON MICRO ELECTRO MECHANICAL SYSTEMS, IEEE PROCEEDINGS: AN INVESTIGATION OF MICRO STRUCTURES, SENSORS, ACTUATORS, MACHINES AND SYSTEMS | 1996年
关键词：
D O I：
10.1109/MEMSYS.1996.493844
中图分类号：
TP [自动化技术、计算机技术];
学科分类号：
0812 ;
摘要：
引用
收藏
页码：146 / 149
页数：4
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