Sinusoidally phase-modulated interference microscope for high-speed high-resolution topographic imagery

被引：26
|
作者：
Dubois, A [1 ]
Vabre, L [1 ]
Boccara, AC [1 ]
机构：
[1] Ecole Super Phys & Chim Ind Ville Paris, CNRS, UPR A0005, Lab Opt Phys, F-75231 Paris 5, France
来源：
OPTICS LETTERS | 2001年 / 26卷 / 23期
关键词：
D O I：
10.1364/OL.26.001873
中图分类号：
O43 [光学];
学科分类号：
070207 ; 0803 ;
摘要：
We describe an interference microscope that produces topographic images with a minimum acquisition time of 20 ms. The system is based on phase-shifting interferometry with sinusoidal phase modulation induced by the oscillation of an interferometric objective (Michelson or Mirau). A CCD camera captures four images per oscillation period to produce a phase map in real time. The system is installed on a commercial microscope. (C) 2001 Optical Society of America.
引用
收藏
页码：1873 / 1875
页数：3
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