Transmission X-ray Diffraction from Bismuth Lines Embedded in Silicon

We have devoted our efforts toward developing transmission X-ray diffraction (TXD) for surface and interface from the viewpoint of realizing more efficient and precise structural analysis than the conventional surface X-ray diffraction. Here, we investigated bismuth lines embedded in a Si(001) substrate, which are promising templates applicable to nanometer-scale device, by TXD. In our experiments with synchrotron X-rays typical one-dimensional diffraction patterns were observed, which obviously indicates that the bismuth lines are still preserved in interface at the atomic scale.