Aging and noise characteristics studying of Low temperature preparing Mn-Co-Ni-O thin films

Mn1.56Co0.96Ni0.48O4 (MCN) thin films with 2 mu m thickness were deposited on amorphous Al2O3 substrates by Radio Frequency magnetron sputtering at 450 degrees C, films were annealed at 450 degrees C, 600 degrees C and 750 degrees C separately. XRD test showed that MCN thin films deposited at 450 degrees C possess preferential orientation (400). The variable temperature resistivity test revealed the resistivity of MCN films decreases with the annealed temperature increases. Aging testing showed that films grown at 450 degrees C and annealed at the same temperature had moderate aging coefficient, meanwhile, the films exhibited favorable noise performance. This paper reports a method to prepare MCN thin films with moderate resistivity, favorable aging and noise characteristics at low temperature(450 degrees C), which is expected to be integrated with the silicon process and has great significance for developing MCN thin film linear or focal plane devices.