Thin film material properties analysis with quartz crystal resonators

被引：7
|
作者：
Lucklum, R [1 ]
Hauptmann, P [1 ]
Cernosek, RW [1 ]
机构：
[1] Otto Von Guericke Univ, Magdeburg, Germany
来源：
PROCEEDINGS OF THE 2001 IEEE INTERNATIONAL FREQUENCY CONTROL SYMPOSIUM & PDA EXHIBITION | 2001年
关键词：
D O I：
10.1109/FREQ.2001.956337
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
引用
收藏
页码：542 / 550
页数：9
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