Embedded Micromirror Inserts for Optical Printed Circuit Boards

被引:21
|
作者
Hendrickx, Nina [1 ]
Van Erps, Juergen [2 ]
Bosman, Erwin [1 ]
Debaes, Christof [2 ]
Thienpont, Hugo [2 ]
Van Daele, Peter [1 ]
机构
[1] Univ Ghent, Dept Informat Technol, B-9052 Zwijnaarde, Belgium
[2] Vrije Univ Brussels, Dept Appl Phys & Photon, B-1050 Brussels, Belgium
关键词
Coupling structures; deep proton writing (DPW); laser ablation; micromirror; optical interconnections; polymer waveguides;
D O I
10.1109/LPT.2008.2004563
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
We present the use of an embedded 45 degrees micromirror, which is patterned in polymer photoresist using deep proton writing. The micromirror is metallized and inserted in a laser ablated cavity in the optical layer and in a next step covered with cladding material. Surface roughness measurements confirm the excellent quality of the mirror facet. Loss measurements have been carried out to evaluate the behavior of the embedded micromirror. These measurements indicate an average loss below 0.35 dB, measured in a receiver scheme, which is the most stringent configuration.
引用
收藏
页码:1727 / 1729
页数:3
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