Spatial shaping of femtosecond laser pulses for improved micromachining efficiency

被引：0
|
作者：
Oosterbeek, Reece N. [1 ,2 ,3 ,4 ]
Ashforth, Simon [1 ,3 ,4 ,5 ]
Bodley, Owen [1 ,2 ,3 ,4 ]
Simpson, M. Cather [1 ,2 ,3 ,4 ,5 ]
机构：
[1] Univ Auckland, Photon Factory, Auckland, New Zealand
[2] Univ Auckland, Sch Chem Sci, Auckland, New Zealand
[3] MacDiarmid Inst Adv Mat & Nanotechnol, Wellington, New Zealand
[4] Dodd Walls Ctr Quantum & Photon Technol, Wellington, New Zealand
[5] Univ Auckland, Dept Phys, Auckland, New Zealand
来源：
2016 CONFERENCE ON LASERS AND ELECTRO-OPTICS (CLEO) | 2016年
关键词：
SURFACE DAMAGE THRESHOLD;
D O I：
暂无
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
We quantify the efficiency of femtosecond micromachining of quartz and silicon as a function of the spatial beam shape (Bessel, vortex, Gaussian). A > 15-fold range of ablation thresholds was observed. Incubation effects were significant.
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页数：2
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