Real time ellipsometric study of boron nitride thin film growth

被引：0
|
作者：
Bertran, E [1 ]
Canillas, A [1 ]
Campmany, J [1 ]
Kasmi, ME [1 ]
Pascual, E [1 ]
Costa, J [1 ]
Andujar, JL [1 ]
机构：
[1] UNIV BARCELONA,DEPT FIS APLICADA & ELECT,LFCF,E-08028 BARCELONA,SPAIN
来源：
COVALENT CERAMICS III - SCIENCE AND TECHNOLOGY OF NON-OXIDES | 1996年 / 410卷
关键词：
D O I：
暂无
中图分类号：
TQ174 [陶瓷工业]; TB3 [工程材料学];
学科分类号：
0805 ; 080502 ;
摘要：
引用
收藏
页码：307 / 312
页数：6
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