Light-scattering characterization of transparent substrates

被引：4
|
作者：
Zerrad, M
Deumié, C
Lecluirne, M
Amra, C
Ewart, M
机构：
[1] Univ Paul Cezanne, Ecole Generaliste Ingn Marseille, UMR CNRSTIC 6133, F-13397 Marseille 20, France
[2] WZW Opt AG, CH-9436 Balgach, Switzerland
来源：
APPLIED OPTICS | 2006年 / 45卷 / 07期
关键词：
D O I：
10.1364/AO.45.001402
中图分类号：
O43 [光学];
学科分类号：
070207 ; 0803 ;
摘要：
Angle-resolved light scattering has been used for decades to quantify the surface roughness of optical components. However, because this technique is affected by the contribution of both interfaces of the sample, it cannot be applied to transparent substrates. We show how to overcome this issue and apply these principles to the characterization of superpolished samples. (c) 2006 Optical Society of America.
引用
收藏
页码：1402 / 1409
页数：8
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