Light-scattering characterization of transparent substrates

被引：4
|
作者：
Zerrad, M
Deumié, C
Lecluirne, M
Amra, C
Ewart, M
机构：
[1] Univ Paul Cezanne, Ecole Generaliste Ingn Marseille, UMR CNRSTIC 6133, F-13397 Marseille 20, France
[2] WZW Opt AG, CH-9436 Balgach, Switzerland
来源：
APPLIED OPTICS | 2006年 / 45卷 / 07期
关键词：
D O I：
10.1364/AO.45.001402
中图分类号：
O43 [光学];
学科分类号：
070207 ; 0803 ;
摘要：
Angle-resolved light scattering has been used for decades to quantify the surface roughness of optical components. However, because this technique is affected by the contribution of both interfaces of the sample, it cannot be applied to transparent substrates. We show how to overcome this issue and apply these principles to the characterization of superpolished samples. (c) 2006 Optical Society of America.
引用
收藏
页码：1402 / 1409
页数：8
相关论文
共 50 条
  • [1] Light-scattering characterization of transparent substrates for Laser-gyro application
    Yang, Kaiyong
    Wei, Zhimeng
    Long, Xingwu
    Zhao, Yun
    Liu, Jianping
    [J]. INTERNATIONAL SYMPOSIUM ON PHOTOELECTRONIC DETECTION AND IMAGING 2011: LASER SENSING AND IMAGING AND BIOLOGICAL AND MEDICAL APPLICATIONS OF PHOTONICS SENSING AND IMAGING, 2011, 8192
  • [2] LIGHT-SCATTERING FROM TRANSPARENT SUBSTRATES - THEORY AND EXPERIMENT
    KIENZLE, O
    STAUB, J
    TSCHUDI, T
    [J]. PHYSICAL REVIEW B, 1994, 50 (03): : 1848 - 1860
  • [3] INVESTIGATIONS OF LIGHT-SCATTERING FROM TRANSPARENT SINGLE LAYERS ON GLASS SUBSTRATES
    WALTHER, HG
    SCHIRMER, G
    [J]. ANNALEN DER PHYSIK, 1984, 41 (01) : 12 - 22
  • [4] Transparent alumina: A light-scattering model
    Apetz, R
    van Bruggen, MPB
    [J]. JOURNAL OF THE AMERICAN CERAMIC SOCIETY, 2003, 86 (03) : 480 - 486
  • [5] TRANSPARENT POLYCRYSTALLINE FERROELECTRICS GOVERNING LIGHT-SCATTERING
    VASILEVSKAYA, AS
    GRODNENSKII, IM
    SONIN, AS
    [J]. FIZIKA TVERDOGO TELA, 1977, 19 (03): : 795 - 803
  • [6] MICROSCOPE FOR STUDY OF TRANSPARENT LIGHT-SCATTERING OBJECTS IN INCIDENT LIGHT
    SVISHCHEV, GM
    [J]. OPTICS AND SPECTROSCOPY-USSR, 1969, 26 (02): : 171 - +
  • [7] Study of light-scattering properties of bare substrates
    Pan Yongqiang
    Wu Zhensen
    [J]. 2006 7TH INTERNATIONAL SYMPOSIUM ON ANTENNAS, PROPAGATION AND EM THEORY, VOLS 1 AND 2, PROCEEDINGS, 2006, : 871 - 874
  • [8] LIGHT-SCATTERING BY A TRANSPARENT SPHERE IN SOFT PARTICLE APPROXIMATION
    PERELMAN, AJ
    [J]. DOKLADY AKADEMII NAUK SSSR, 1985, 281 (01): : 51 - 54
  • [9] ATTENUATION FACTOR DUE TO LIGHT-SCATTERING BY TRANSPARENT PARTICLES
    GRANOVSKII, YI
    STON, M
    [J]. ZHURNAL EKSPERIMENTALNOI I TEORETICHESKOI FIZIKI, 1994, 105 (05): : 1199 - 1207
  • [10] DYNAMIC LIGHT-SCATTERING FOR CHARACTERIZATION OF LATTICES
    KILLMANN, E
    SAPUNTZJIS, P
    MAIER, H
    [J]. MAKROMOLEKULARE CHEMIE-MACROMOLECULAR SYMPOSIA, 1992, 61 : 42 - 58
12345