MOEMS tunable optical filter based on photonic crystals

被引：1
|
作者：
Mao, HB
Jing, WP
机构：
[1] E China Normal Univ, Dept Elect Sci & Technol, Shanghai 200062, Peoples R China
[2] Nantong Univ, Jiangsu Provincial Key Lab ASIC Design, Nantong 226007, Peoples R China
来源：
JOURNAL OF MICROLITHOGRAPHY MICROFABRICATION AND MICROSYSTEMS | 2005年 / 4卷 / 04期
基金：
中国国家自然科学基金;
关键词：
photonic crystal; MEMS; tunable optical filter; MOEMS;
D O I：
10.1117/1.2109792
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
1-D photonic crystals with defects such as (L1H1)(LCH2)-L-m(L2H2)(n) are investigated. The bandgap edge transmission peak is narrowed when the couple layer L-C and the cover layer H-2(L2H2)(n) are added to the photonic crystal (L1H1)(m). Three different structures are studied. Structure A is not suitable for the tunable filter, which has two discrete tuning regions. Structures B and C provide good optical tuning methods: large dynamic range (> 150nm), narrow bandwidth [full-width at half maximum (FWHM) is about 2 nm], and good tuning linearity. These structures can be easily fabricated by the surface micromachined technique. (c) 2005 Society of Photo-Optical Instrumentation Engineers.
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页数：5
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