Chemical compatibility of self-lubricating ceramic tool materials, such as Al2O3/TiC/MoS2, Al2O3/TiC/h-BN, Al2O3/TiC/CaF2, were analyzed and calculated, and the results were verified by X-ray diffraction patterns. The optimal volume content of solid lubricant was calculated by the thermal stress theory under specific condition. The results show that under high temperature, there were some reactions in Al2O3/TiC/MoS2 and Al2O3/TiC/h-BN, while there were no reactions in Al2O3/TiC/CaF2. To Al2O3/TiC/CaF2, the optimal volume content of CaF2 is 25.1% under specific condition.