Cubic GaN quantum dots embedded in zinc-blende AlN microdisks

被引：5

作者：

Buerger, M. ^{[1
]}

Kemper, R. M. ^{[1
]}

Bader, C. A. ^{[1
]}

Ruth, M. ^{[1
]}

Declair, S. ^{[1
]}

Meier, C. ^{[1
]}

Foerstner, J. ^{[1
]}

As, D. J. ^{[1
]}

机构：

[1] Univ Paderborn, Dept Phys, D-33098 Paderborn, Germany

来源：

JOURNAL OF CRYSTAL GROWTH | 2013年 / 378卷

关键词：

Etching; Low dimensional structures; Nanostructures; Optical microscopy; Molecular beam epitaxy; Nitrides;

D O I：

10.1016/j.jcrysgro.2012.12.058

中图分类号：

O7 [晶体学];

学科分类号：

0702 ; 070205 ; 0703 ; 080501 ;

摘要：

Microresonators containing quantum dots find application in devices like single photon emitters for quantum information technology as well as low threshold laser devices. We demonstrate the fabrication of 60 nm thin zinc-blende AlN microdisks including cubic GaN quantum dots using dry chemical etching techniques. Scanning electron microscopy analysis reveals the morphology with smooth surfaces of the microdisks. Micro-photoluminescence measurements exhibit optically active quantum dots. Furthermore this is the first report of resonator modes in the emission spectrum of a cubic AlN microdisk. (c) 2012 Elsevier B.V. All rights reserved.

引用

页码：287 / 290

页数：4

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