Gas Breakdown of Radio Frequency Glow Discharges in Helium at near Atmospheric Pressure

被引：0
|
作者：
Liu Xinkun [1 ]
Xu Jinzhou [1 ]
Cui Tongfei [1 ]
Guo Ying [1 ,2 ]
Zhang Jing [1 ,2 ]
Shi Jianjun [1 ,2 ]
机构：
[1] Donghua Univ, Sch Sci, Shanghai 201602, Peoples R China
[2] Minist Educ Peoples Republ China, Magnet Confinement Fus Res Ctr, Shanghai 201602, Peoples R China
来源：
PLASMA SCIENCE & TECHNOLOGY | 2013年 / 15卷 / 07期
关键词：
radio frequency glow discharge; gas breakdown; numerical simulation;
D O I：
10.1088/1009-0630/15/7/04
中图分类号：
O35 [流体力学]; O53 [等离子体物理学];
学科分类号：
070204 ; 080103 ; 080704 ;
摘要：
A one-dimensional self-consistent fluid model was developed for radio frequency glow discharge in helium at near atmospheric pressure, and was employed to study the gas breakdown characteristics in terms of breakdown voltage. The effective secondary electron emission coefficient and the effective electric field for ions were demonstrated to be important for determining the breakdown voltage of radio frequency glow discharge at near atmospheric pressure. The constant of A was estimated to be 64 +/- 4 cm (-1)Torr(-1), which was proportional to the first Townsend coefficient and could be employed to evaluate the gas breakdown voltage. The reduction in the breakdown voltage of radio frequency glow discharge with excitation frequency was studied and attributed to the electron trapping effect in the discharge gap.
引用
收藏
页码：623 / 626
页数：4
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