Transport line for beam generated by ITEP Bernas ion source

被引：5
|
作者：
Petrenko, SV [1 ]
Kropachev, GN
Kuibeda, RP
Kulevoy, TV
Pershin, VI
Masunov, ES
Polozov, SM
Hershcovitch, A
Johnson, BM
Poole, HJ
机构：
[1] Inst Theoret & Expt Phys, Moscow 117218, Russia
[2] Moscow Engn Phys Inst, Moscow 115409, Russia
[3] Brookhaven Natl Lab, Upton, NY 11973 USA
[4] PVI, Oxnard, CA 93031 USA
来源：
REVIEW OF SCIENTIFIC INSTRUMENTS | 2006年 / 77卷 / 03期
关键词：
D O I：
10.1063/1.2165746
中图分类号：
TH7 [仪器、仪表];
学科分类号：
0804 ; 080401 ; 081102 ;
摘要：
A joint research and development program is underway to investigate beam transport systems for intense steady-state ion sources for ion implanters. Two energy extremes of MeV and hundreds of eV are investigated using a modified Bernas ion source with an indirectly heated cathode. Results are presented for simulations of electrostatic systems performed to investigate the transportation of ion beams over a wide mass range: boron to decaborane. (c) 2006 American Institute of Physics.
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页数：3
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