On negative ions Langmuir probe measurements in an Ar+4%CF4 currentless plasma

被引:0
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作者
Popov, T [1 ]
Ivanova, D [1 ]
Tchernookov, M [1 ]
机构
[1] Univ Sofia, Fac Phys, Sofia 1164, Bulgaria
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TB3 [工程材料学];
学科分类号
0805 ; 080502 ;
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页码:473 / 474
页数:2
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