Laser direct writing system for fabrication of smooth-relief micro-optical elements

被引：0
|
作者：
Svetovoy, VB
Amirov, II
Babanov, YE
机构：
来源：
SECOND INTERNATIONAL CONFERENCE ON OPTICAL INFORMATION PROCESSING | 1996年 / 2969卷
关键词：
micro-optics; direct laser writing; polymer laser etching; refractive microlenses;
D O I：
10.1117/12.262648
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
A direct writing system based on a pulsed N-2 laser is presented. It allows to create continuous relief in a number of polymeric materials. Polymers are etched in air directly under the laser beam action. It is possible to make a computer controlling smooth relief with a depth more than 40 mu m. High speed cylindrical lens has been fabricated in polyimid film to demonstrate the abilities of the system.
引用
收藏
页码：248 / 251
页数：4
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