High-Quality Integrated Inductors Based on Multilayered Meta-Conductors

被引：6

作者：

Iramnaaz, I. ^{[1
]}

Schellevis, Hugo ^{[2
]}

Rejaei, Behzad ^{[3
]}

Fitch, Robert ^{[4
]}

Zhuang, Yan ^{[1
]}

机构：

[1] Wright State Univ, Dept Elect Engn, Dayton, OH 45435 USA

[2] Delft Univ Technol, Dept Elect Engn, Delft, Netherlands

[3] Sharif Univ Technol, Dept Elect Engn, Tehran, Iran

[4] USAF, Sensors Directorate, Res Lab, Wright Patterson AFB, OH 45433 USA

来源：

IEEE MICROWAVE AND WIRELESS COMPONENTS LETTERS | 2012年 / 22卷 / 07期

关键词：

Ferromagnetic resonance (FMR); inductor; magnetic thin film; quality factor; radio frequency (RF); SPIRAL INDUCTORS; RF ICS; SILICON; DESIGN; FILMS; SUPPRESSION; SI;

D O I：

10.1109/LMWC.2012.2201710

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

We demonstrate high-quality integrated inductors built from a multilayer of alternating copper and ferromagnetic films. The multilayer acts as a meta-conductor whose effective permeability becomes nearly zero at its ferromagnetic anti-resonance frequency. This leads to a suppression of the skin effect and a significant increase in the quality factor of the device. Experiments show an up to 86% increase in quality factor compared to conventional copper-based spiral inductors at high frequencies.

引用

页码：345 / 347

页数：3

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