The glow discharge: an exciting plasma!

被引:39
|
作者
Bogaerts, A [1 ]
机构
[1] Univ Antwerp, Dept Chem, B-2610 Antwerp, Belgium
关键词
D O I
10.1039/a900772e
中图分类号
O65 [分析化学];
学科分类号
070302 ; 081704 ;
摘要
Glow discharges are used in a large number of application fields. Their use as a spectroscopic source for analytical chemistry is only one application; they are much more widely used for other purposes, such as in the micro-electronics industry and in materials technology, and also as lasers, various kinds of light sources, and in the new upcoming plasma displays. In this review we will give a brief overview of these applications. In order to improve the results in these application fields and, in general, to obtain a better understanding of the plasma processes, various modeling approaches for glow discharges, mainly for the non-analytical applications, have been described in the literature, of which a brief overview will be given here. Finally, our own modeling network, which is specifically applied to analytical glow discharges, will be briefly described and some typical results will be shown.
引用
收藏
页码:1375 / 1384
页数:10
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