The observation of tin islands in Nb3Sn thin films deposited by magnetron sputtering

被引：8

作者：

Tan, Weiwei ^{[1
]}

Ma, Rui ^{[1
]}

Pan, Hui ^{[1
]}

Zhao, Huijing ^{[1
]}

He, Xin ^{[1
]}

Chen, Xiaohuan ^{[1
]}

Zhao, Cuina ^{[1
]}

Lu, Xiangyang ^{[2
]}

机构：

[1] China Ship Dev & Design Ctr, 268 Zhangzhidong Rd, Wuhan 430060, Peoples R China

[2] Peking Univ, State Key Lab Nucl Phys & Technol, Beijing 100871, Peoples R China

来源：

PHYSICA C-SUPERCONDUCTIVITY AND ITS APPLICATIONS | 2020年 / 576卷

关键词：

Nb3Sn thin film; Magnetron sputtering; Superconducting cavities;

D O I：

10.1016/j.physc.2020.1353667

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

Superconducting Nb3Sn thin films have been produced on copper substrate by dc magnetron co-sputtering technique successfully. XRD and magnetic moment measurement demonstrate the exist of Nb3Sn crystal. By changing the ratio between niobium target sputtering current to tin target, the tin concentration in different films is varied. However, the experiment results indicate critical temperature T-C of different Nb3Sn thin film are nearly invariable while the composition of Nb-Sn of those are changed. Highest T-C of those films annealing at 650 degrees C are around 12K, while 750 degrees C annealing increase it to 15K. The SEM and element analysis results manifest inhomogenous distribution of tin atoms, where some tin islands appear over the film. The exist of tin-rich areas like tin islands is responsible for such particular performance of Nb3Sn films.

引用

页数：7

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