Radiation effects in thin-film ferroelectric PZT for non-volatile memory applications in microelectronics

被引:24
|
作者
Leray, JL
Musseau, O
Paillet, P
Autran, JL
Sodi, D
Coic, YM
机构
[1] Commissariat à l'Énergie Atomique, Centre d'Études de Bruyères-Le-Châtel, 91680 Bruyeres-Le-Chatel
来源
JOURNAL DE PHYSIQUE III | 1997年 / 7卷 / 06期
关键词
D O I
10.1051/jp3:1997185
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
This paper deals with ionising radiation effects (X or gamma-rays) in ferroelectric materials for electronic non-volatile memories. After the recall of main observations, mechanisms are analysed and proposed to take into account the effects in PZT-based capacitors. Fatigue of the hysteresis cycle are studied and linked to irradiation effects. As for irradiation, fatigue shows a damping of hysteresis curves. We show that a connection exists between fatigue and irradiation. A mechanism is proposed based on domain wall motion and pinning.
引用
收藏
页码:1227 / 1243
页数:17
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