PREPARATION AND MICROSTRUCTURE OF ZnO THIN FILMS BY SOL-GEL PROCESS

Zinc oxide thin films were prepared from metallo-organic compounds through the sol-gel process. The crystal structure of ZnO films was investigated by XRD and SEM. Optical properties of the thin films were analyzed by using UV/visible spectroscopy. Strongly c-axis oriented ZnO thin films were obtained on fused quartz substrates; the surface of the thin films was smooth, homogeneous, crack-free, and dense. The growth of the thin films depends strongly on the heat-treatment conditions. The Crystal lattice constant of the thin films is a little larger than that of the ZnO crystal, the band gap is 3. 444 eV, and the absorption limit shifts to shorter wavelengths.