PREPARATION AND MICROSTRUCTURE OF ZnO THIN FILMS BY SOL-GEL PROCESS

被引：3

作者：

Bao, Dinghua ^{[1
,2
]}

Gu, Haoshuang ^{[1
]}

Kuang, Anxiang ^{[1
]}

机构：

[1] Hubei Univ, Inst Piezoelect Ceram, Wuhan 430062, Peoples R China

[2] Xian Jiao Tong Univ, Elect Mat Res Lab, Xian 710049, Peoples R China

来源：

FERROELECTRICS | 1996年 / 186卷

关键词：

D O I：

10.1080/00150199608218068

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

Zinc oxide thin films were prepared from metallo-organic compounds through the sol-gel process. The crystal structure of ZnO films was investigated by XRD and SEM. Optical properties of the thin films were analyzed by using UV/visible spectroscopy. Strongly c-axis oriented ZnO thin films were obtained on fused quartz substrates; the surface of the thin films was smooth, homogeneous, crack-free, and dense. The growth of the thin films depends strongly on the heat-treatment conditions. The Crystal lattice constant of the thin films is a little larger than that of the ZnO crystal, the band gap is 3. 444 eV, and the absorption limit shifts to shorter wavelengths.

引用

页码：211 / 214

页数：4

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