Influence of radio frequency power on structure and ionic conductivity of LiPON thin films

被引：44
|
作者：
Hu, Zongqian [1 ]
Li, Dezhan [1 ]
Xie, Kai [1 ]
机构：
[1] Natl Univ Defense Technol, Coll Aerosp & Mat Engn, Changsha 410073, Hunan, Peoples R China
来源：
BULLETIN OF MATERIALS SCIENCE | 2008年 / 31卷 / 04期
关键词：
LiPON; solid state electrolyte; thin films; radio frequency power;
D O I：
10.1007/s12034-008-0108-z
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
Lithium phosphorus oxynitride (LiPON) thin films as solid electrolytes were prepared by radio frequency magnetron sputtering of a Li3PO4 target in ambient nitrogen atmosphere. The influence of radio frequency (rf) power on the structure and the ionic conductivity of LiPON thin films has been investigated. The morphology, composition, structure and ionic conductivity of thin films were characterized by scanning electron microscopy, energy dispersive spectroscopy, X-ray diffraction, X-ray photoelectron spectroscopy and a. c. impedance measurement. It was found that ionic conductivity of LiPON thin films increases with N content in thin films. XPS measurements reveal that ionic conductivity also keeps relativity with the structure of thin films. Higher the N-t/N-d ratio, higher will be the ionic conductivity of LiPON thin films. And both of them can be improved by increasing rf power from 1.5 W/cm(2) to 5.5 W/cm(2).
引用
收藏
页码：681 / 686
页数：6
相关论文
共 50 条
  • [31] Analysis of the Properties of Tungsten Carbide Thin Films According to the Sputtering Radio Frequency Power
    Lee, Seokwon
    Kim, Jung Hyun
    Park, Young
    Choi, Wonseok
    SCIENCE OF ADVANCED MATERIALS, 2020, 12 (10) : 1568 - 1571
  • [32] Effects of power on properties of ZnO thin films grown by radio frequency magnetron sputtering
    Zhao, Ya-Jun
    Jiang, Da-Yong
    Zhao, Man
    Deng, Rui
    Qin, Jie-Ming
    Gao, Shang
    Liang, Qing-Cheng
    Zhao, Jian-Xun
    APPLIED SURFACE SCIENCE, 2013, 266 : 440 - 444
  • [33] Effects of radio frequency power on the microstructures and properties of plasma polymerized polypyrrole thin films
    Li, Chuan
    Hsieh, J. H.
    Lee, Y. T.
    VACUUM, 2017, 140 : 132 - 138
  • [34] Radio frequency power effect on charge density of PECVD-SiN thin films
    Kim, Byungwhan
    Kim, Jeong
    Uh, Hyung Soo
    JOURNAL OF THE CERAMIC SOCIETY OF JAPAN, 2007, 115 (1347) : 772 - 775
  • [35] Microstructure and ionic conductivity of LLTO thin films: Influence of different substrates and excess lithium in the target
    Aguesse, Frederic
    Roddatis, Vladimir
    Roqueta, Jaume
    Garcia, Pablo
    Pergolesi, Daniele
    Santiso, Jose
    Kilner, John A.
    SOLID STATE IONICS, 2015, 272 : 1 - 8
  • [36] Study on FN-DLC thin films: (II) effect of radio frequency power on the optical band gap of the thin films
    Xiao Jian-Rong
    Xu Hui
    Guo Ai-Min
    Wang Huan-You
    ACTA PHYSICA SINICA, 2007, 56 (03) : 1809 - 1814
  • [37] Investigation of the local structure of LiPON thin films to better understand the role of nitrogen on their performance
    Fleutot, B.
    Pecquenard, B.
    Martinez, H.
    Letellier, M.
    Levasseur, A.
    SOLID STATE IONICS, 2011, 186 (01) : 29 - 36
  • [38] Influence of radio frequency magnetron sputtering parameters on the structure and performance of SiC films
    Liu, Meng
    Yang, Yong
    Mao, Quan
    Wei, Yuquan
    Li, Yajie
    Ma, Ningning
    Liu, Huan
    Liu, Xuejian
    Huang, Zhengren
    CERAMICS INTERNATIONAL, 2021, 47 (17) : 24098 - 24105
  • [39] Structure and ionic conductivity of reactively sputtered apatite-type lanthanum silicate thin films
    Vieira, M. M.
    Oliveira, J. C.
    Shaula, A. L.
    Trindade, B.
    Cavaleiro, A.
    SURFACE & COATINGS TECHNOLOGY, 2014, 247 : 14 - 19
  • [40] STRUCTURE AND COMPOSITION OF CDSBTE THIN-FILMS GROWN BY RADIO-FREQUENCY SPUTTERING
    ALVAREZFREGOSO, O
    SANCHEZSINENCIO, F
    MENDOZAALVAREZ, JG
    ZELAYA, O
    FARIAS, MH
    COTAARAIZA, L
    SOTO, G
    REVISTA MEXICANA DE FISICA, 1994, 40 (03) : 418 - 426
12345