H2 and NO2 gas sensors with ZnO nanobelt layer on 36° LiTaO3 and 64° LiNbO3SAW transducers

被引：0
|
作者：
Sadek, AZ [1 ]
Wlodarski, W [1 ]
Kalantar-Zadeh, K [1 ]
Powell, DA [1 ]
Hughes, WL [1 ]
Buchine, BA [1 ]
Wang, ZL [1 ]
机构：
[1] RMIT Univ, Sensor Technol Lab, Sch Elect & Comp Engn, Melbourne, Vic, Australia
来源：
2005 IEEE SENSORS, VOLS 1 AND 2 | 2005年
关键词：
D O I：
暂无
中图分类号：
TH7 [仪器、仪表];
学科分类号：
0804 ; 080401 ; 081102 ;
摘要：
Single crystal nanobelts of ZnO were synthesized and deposited onto 36 degrees YX LiTaO3 and 64 degrees YX LiNbO3 Surface Acoustic Wave (SAW) devices for gas sensing applications. Sensor response, defined as the change in resonant frequency, was measured for H-2 and NO2 between 20 and 200 degrees C. Measured sensor responses were 3.5 kHz towards 10 ppm NO2 for a 64 degrees LiNbO3 SAW transducer operating at 160 degrees C and 3 kHz towards 1% H-2 for a 36 degrees LiTaO3 SAW transducer operating at 185*C temperature.
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收藏
页码：1343 / 1346
页数：4
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