Time-delayed, time-resolved Langmuir probe diagnostics of pulsed plasmas

被引：4
|
作者：
Qin, S [1 ]
McTeer, A [1 ]
机构：
[1] Micron Technol Inc, Boise, ID 83707 USA
来源：
APPLIED PHYSICS LETTERS | 2005年 / 87卷 / 24期
关键词：
D O I：
10.1063/1.2146209
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
A method called time-delayed, time-resolved Langmuir probe measurement is used to measure pulsed plasmas to overcome the secondary electron emission during high-voltage pulses. The plasma densities of the pulsed-mode plasma or any plasmas with secondary electron issues can be measured and analyzed by using this method. (c) 2005 American Institute of Physics.
引用
收藏
页码：1 / 3
页数：3
相关论文
共 50 条
  • [31] Time-resolved multiple probe spectroscopy
    Greetham, G. M.
    Sole, D.
    Clark, I. P.
    Parker, A. W.
    Pollard, M. R.
    Towrie, M.
    REVIEW OF SCIENTIFIC INSTRUMENTS, 2012, 83 (10):
  • [32] A synchronized emissive probe for time-resolved plasma potential measurements of pulsed discharges
    Sanders, Jason M.
    Rauch, Albert
    Mendelsberg, Rueben J.
    Anders, Andre
    REVIEW OF SCIENTIFIC INSTRUMENTS, 2011, 82 (09):
  • [33] Time-resolved electrostatic probe studies of a pulsed inductively-coupled plasma
    Tang, XM
    Manos, DM
    PLASMA SOURCES SCIENCE & TECHNOLOGY, 1999, 8 (04): : 594 - 602
  • [34] TIME-RESOLVED DIAGNOSTIC METHOD FOR HYDROGEN PLASMAS
    EDWARDS, DF
    BACON, ME
    LITVAK, MM
    INTERNATIONAL JOURNAL OF ELECTRONICS, 1972, 33 (01) : 105 - +
  • [35] Time-resolved measurements of electron density in nanosecond pulsed plasmas using microwave scattering
    Wang, Xingxing
    Stockett, Paul
    Jagannath, Ravichandra
    Bane, Sally
    Shashurin, Alexey
    PLASMA SOURCES SCIENCE & TECHNOLOGY, 2018, 27 (07):
  • [36] Time-resolved optical emission spectroscopy of pulsed RF plasmas with copper magnetron sputtering
    Kang, Namjun
    Park, Junghoon
    Oh, Soo-ghee
    Kim, Yongmo
    Han, Jeon-geon
    THIN SOLID FILMS, 2008, 516 (11) : 3460 - 3463
  • [37] Time-resolved cavity ringdown spectroscopy as a monitoring technique of nanoparticles in pulsed VHF plasmas
    Nagai, Takehiko
    Smets, Arno H. M.
    Kondo, Michio
    AMORPHOUS AND POLYCRYSTALLINE THIN-FILM SILICON SCIENCE AND TECHNOLOGY 2007, 2007, 989 : 583 - 588
  • [38] Time-resolved diagnostics for concrete target response
    Baum, DW
    Kuklo, RM
    Reaugh, JE
    Simonson, SC
    INTERNATIONAL JOURNAL OF IMPACT ENGINEERING, 1997, 20 (1-5) : 93 - 100
  • [39] Time-resolved ion flux measurements in pulsed, electron-beam-generated plasmas
    Walton, SG
    Leonhardt, D
    Blackwell, DD
    Fernsler, RF
    Murphy, DP
    Meger, RA
    PHYSICAL REVIEW E, 2002, 65 (04):
  • [40] Time-resolved diagnostics of a bipolar HiPIMS discharge
    Hippler, Rainer
    Cada, Martin
    Hubicka, Zdenek
    JOURNAL OF APPLIED PHYSICS, 2020, 127 (20)
12345