Optical properties of SiOxNy thin films prepared by ion beam assisted deposition

被引：0
|
作者：
Cho, HJK [1 ]
You, IG [1 ]
Hwangbo, CK [1 ]
机构：
[1] INHA UNIV,DEPT PHYS,INCHON 402751,SOUTH KOREA
来源：
17TH CONGRESS OF THE INTERNATIONAL COMMISSION FOR OPTICS: OPTICS FOR SCIENCE AND NEW TECHNOLOGY, PTS 1 AND 2 | 1996年 / 2778卷
关键词：
D O I：
暂无
中图分类号：
O43 [光学];
学科分类号：
070207 ; 0803 ;
摘要：
引用
收藏
页码：209 / 210
页数：2
相关论文
共 50 条
  • [31] STRUCTURE AND OPTICAL-PROPERTIES OF TIN FILMS PREPARED BY DC SPUTTERING AND BY ION-BEAM ASSISTED DEPOSITION
    BONELLI, M
    GUZMAN, LA
    MIOTELLO, A
    CALLIARI, L
    ELENA, M
    OSSI, PM
    VACUUM, 1992, 43 (5-7) : 459 - 462
  • [32] Properties of optical thin films and coatings prepared by reactive electron-beam deposition with and without ion bombardments
    Tsai, RY
    Shiau, SC
    Lee, CH
    Ho, FC
    Hua, MY
    OPTICAL ENGINEERING, 1997, 36 (12) : 3433 - 3438
  • [33] Corrosion resistance of iron thin films prepared by ion-beam-sputter and ion-beam-assisted deposition
    Kaneko, Tetsuji
    Akao, Noboru
    Hara, Nobuyoshi
    Sugimoto, Katsuhisa
    Zairyo to Kankyo/ Corrosion Engineering, 2000, 49 (05): : 301 - 306
  • [34] Indium tin oxide thin films prepared by ion beam assisted deposition technique at different ion beam currents
    Meng, Lijian
    Gao, Jinsong
    Teixeira, V.
    dos Santos, M. P.
    PHYSICA STATUS SOLIDI A-APPLICATIONS AND MATERIALS SCIENCE, 2008, 205 (08): : 1961 - 1966
  • [35] ION-BEAM-ASSISTED DEPOSITION OF OPTICAL FILMS
    MARTIN, PJ
    MACLEOD, HA
    NETTERFIELD, RP
    PACEY, CG
    SAINTY, WG
    JOURNAL OF THE OPTICAL SOCIETY OF AMERICA, 1982, 72 (12) : 1733 - 1733
  • [36] The structural, optical and secondary electron emission properties of MgO and Mg-O-Cs thin films prepared by ion beam assisted deposition
    Rho, SJ
    Jeong, SM
    Baik, HK
    Song, KM
    THIN SOLID FILMS, 1999, 355 : 55 - 59
  • [37] Structural, optical and secondary electron emission properties of MgO and Mg-O-Cs thin films prepared by ion beam assisted deposition
    Rho, Soon Joon
    Jeong, Soon Moon
    Baik, Hong Koo
    Song, Kie Moon
    Thin Solid Films, 1999, 355 : 55 - 59
  • [38] Structural properties of amorphous carbon nitride films prepared by ion beam assisted deposition
    Ferlauto, AS
    Champi, A
    Figueroa, CA
    Ribeiro, CTM
    Marques, FC
    Alvarez, F
    JOURNAL OF NON-CRYSTALLINE SOLIDS, 2004, 338 : 486 - 489
  • [39] Mechanical properties and residual stress in AlN films prepared by ion beam assisted deposition
    Watanabe, Y
    Kitazawa, N
    Nakamura, Y
    Li, CL
    Sekino, T
    Niihara, K
    JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 2000, 18 (04): : 1567 - 1570
  • [40] Structure and properties of TiO2 films prepared by ion beam assisted deposition
    Cheng, Xiaoling
    Hu, Shejun
    Zeng, Peng
    Kuang, Tongchun
    Xie, Guangrong
    Gao, Feng
    SURFACE & COATINGS TECHNOLOGY, 2007, 201 (9-11): : 5552 - 5555
12345