共 50 条
- [21] Effect of precursor-pulse on properties of Al-doped ZnO films grown by atomic layer deposition JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS BRIEF COMMUNICATIONS & REVIEW PAPERS, 2005, 44 (02): : 1062 - 1066
- [22] Effect of precursor-pulse on properties of Al-doped ZnO films grown by atomic layer deposition Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers, 2005, 44 (02): : 1062 - 1066
- [23] Infrared and microwave shielding of transparent Al-doped ZnO superlattice grown via atomic layer deposition Journal of Materials Science, 2013, 48 : 2536 - 2542
- [26] Atomic layer deposition prepared Al-doped ZnO for liquid crystal displays applications Optical and Quantum Electronics, 2018, 50
- [27] Electrical and Optical Properties of Al-doped ZnO Films Deposited by Atomic Layer Deposition KOREAN JOURNAL OF MATERIALS RESEARCH, 2013, 23 (08): : 469 - 475
- [28] Optical and electrical properties of Al-doped ZnO thin films by atomic layer deposition Journal of Materials Science: Materials in Electronics, 2020, 31 : 17365 - 17374