Simulation and modelling of the drive mode nonlinearity in MEMS-gyroscopes

被引：5
|
作者：
Putnik, Martin [1 ]
Cardanobile, Stefano [1 ]
Nagel, Cristian [2 ]
Degenfeld-Schonburg, Peter [2 ]
Mehner, Jan [3 ]
机构：
[1] Robert Bosch GmbH, Automot Elect, Tuebingerstr 123, D-72762 Reutlingen, Germany
[2] Robert Bosch GmbH, Corp Res, Robert Bosch Campus 1, D-71272 Renningen, Germany
[3] Tech Univ Chemnitz, Microsyst & Biomed Engn, Reichenhainer Str 70, D-09107 Chemnitz, Germany
来源：
PROCEEDINGS OF THE 30TH ANNIVERSARY EUROSENSORS CONFERENCE - EUROSENSORS 2016 | 2016年 / 168卷
关键词：
Duffing; geometric nonlinearity; drive mode; MEMS; modelling;
D O I：
10.1016/j.proeng.2016.11.313
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
Due to manufacturing uncertainties and due to geometric constraints on the moving structure, the drive mode of MEMS gyroscopes may exhibit high intrinsic nonlinearity [1, 5]. The type of the drive mode nonlinearity is mainly quadratic in amplitude [5-6]. Thus, a cubic nonlinearity term can account for the geometric nonlinearities of the structure [4-7]. Here, we present a method to model the drive mode nonlinearity to first order in frequency by using static analysis in the finite element domain. We construct the free parameter in the Duffing nonlinearity term using the results of the static analysis tool. Finally, we verify the 1D Duffing oscillator model with full transient FE simulations of a MEMS gyroscope test structure. (C) 2016 The Authors. Published by Elsevier Ltd.
引用
收藏
页码：950 / 953
页数：4
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