Nanofabrication of grid-patterned substrate by holographic lithography

被引：5
|
作者：
Huang, CJ
Zhu, XP
Li, C
Zuo, YH
Cheng, BW
Li, DZ
Luo, LP
Yu, JZ
Wang, QM
机构：
[1] Chinese Acad Sci, Inst Semicond, State Key Lab Integrated Optoelect, Beijing 100083, Peoples R China
[2] Chinese Acad Sci, Inst Semicond, Natl Engn Res Ctr Optoelect Devices, Beijing 100083, Peoples R China
来源：
JOURNAL OF CRYSTAL GROWTH | 2002年 / 236卷 / 1-3期
基金：
中国国家自然科学基金;
关键词：
etching; nanostructures; substrates;
D O I：
10.1016/S0022-0248(01)02388-0
中图分类号：
O7 [晶体学];
学科分类号：
0702 ; 070205 ; 0703 ; 080501 ;
摘要：
The two-dimensional grid patterns on Si(001) in nanometer scale have been fabricated by holographic lithography and reactive ion etching, which can be used as a substrate for positioning Ge islands during self-assembled epitaxy to obtain an ordered Ge quantum dots matrix. By changing the configuration of the holographic lithography and the etching rate and time, we can control the grid period, the shape of the pattern cell, and the orientation of those shapes, respectively. (C) 2002 Elsevier Science B.V. All rights reserved.
引用
收藏
页码：141 / 144
页数：4
相关论文
共 50 条
  • [1] Lubrication performance of the grid-patterned microcirculation surface
    Lu, Yan
    Liu, Zuo-Min
    Mocaxue Xuebao/Tribology, 2013, 33 (04): : 357 - 362
  • [2] Preparation of two-dimensional patterned silicon substrate by holographic lithography
    Semiconductor Photonics Research Center, Department of Physics, Xiamen University, Xiamen 361005, China
    Pan Tao Ti Hsueh Pao, 2007, 5 (774-777):
  • [3] Nanofabrication with Laser Holographic Lithography for Nanophotonic Structures
    Yeo, Jong-Souk
    Lewis, Henry
    Meyer, Neal
    JOURNAL OF LASER MICRO NANOENGINEERING, 2007, 2 (01): : 31 - 35
  • [4] NANOFABRICATION OF GRATING AND DOT PATTERNS BY ELECTRON HOLOGRAPHIC LITHOGRAPHY
    OGAI, K
    KIMURA, Y
    SHIMIZU, R
    FUJITA, J
    MATSUI, S
    APPLIED PHYSICS LETTERS, 1995, 66 (12) : 1560 - 1562
  • [5] Patterned polymer photonic crystals using soft lithography and holographic lithography
    Moon, JH
    Small, A
    Yi, GR
    Lee, SK
    Chang, WS
    Pine, DJ
    Yang, SM
    SYNTHETIC METALS, 2005, 148 (01) : 99 - 102
  • [6] Surface Reconstruction of Microscale Objects Based on Grid-Patterned Structured-Light Measurements
    Wang, Yuezong
    Chen, Jiqiang
    Peng, Youfan
    MICROSCOPY AND MICROANALYSIS, 2022, 28 (01) : 152 - 172
  • [7] Convex grid-patterned microstructures on silicon induced by femtosecond laser assisted with chemical etching
    Wang, Cong
    Tian, Yaxiang
    Luo, Zhi
    Zheng, Yu
    Zhang, Fan
    Ding, Kaiwen
    Duan, Ji'an
    OPTICS AND LASER TECHNOLOGY, 2019, 119
  • [8] High crystalline quality heteroepitaxial diamond using grid-patterned nucleation and growth on Ir
    Ichikawa, Kimiyoshi
    Kurone, Kengo
    Kodama, Hideyuki
    Suzuki, Kazuhiro
    Sawabe, Atsuhito
    DIAMOND AND RELATED MATERIALS, 2019, 94 : 92 - 100
  • [9] Antireflective properties of AZO subwavelength gratings patterned by holographic lithography
    Leem, J. W.
    Song, Y. M.
    Lee, Y. T.
    Yu, J. S.
    APPLIED PHYSICS B-LASERS AND OPTICS, 2010, 99 (04): : 695 - 700
  • [10] Cell Growth Orientated in Substrate Fabricated by Holographic Lithography and Nanoimprint Lithography
    Sun, Hongwen
    Liu, Jingquan
    Chen, Di
    PROCEEDINGS OF THE 2009 2ND INTERNATIONAL CONFERENCE ON BIOMEDICAL ENGINEERING AND INFORMATICS, VOLS 1-4, 2009, : 1091 - +
12345